Low‐temperature redistribution of Cr in boron‐implanted GaAs in the absence of encapsulant stress
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.92003
Reference10 articles.
1. Chromium profiles in semi‐insulating GaAs after annealing with a Si3N4encapsulant
2. Redistribution of Cr during annealing of80Se‐implanted GaAs
3. Implantation of shallow impurities in Cr‐doped semi‐insulating GaAs
4. Back surface gettering and Cr out‐diffusion in VPE GaAs layers
5. Alloying of Au layers and redistribution of Cr in GaAs
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Transmission electron microscopy study of fluorine and boron implanted and annealed GaAs/AlGaAs;Applied Physics Letters;1994-07-04
2. Diffusion mechanism of chromium in GaAs;Journal of Applied Physics;1991-11
3. Mechanism of Cr Diffusion in GaAs;MRS Proceedings;1991
4. Implantation d'oxygène et co-implantation d'oxygène et de silicium, à faible dose, dans GaAs. I. Etude du phénomène de compensation;Revue de Physique Appliquée;1989
5. Ion Implantation in Iii–V Semiconductors;Materials Processing: Theory and Practices;1989
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