Deposition mechanism of hydrogenated amorphous silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.372226
Reference76 articles.
1. Glow-discharge amorphous silicon: Growth process and structure
2. Role of Surface and Growth-Zone Reactions in the Formation Process of µc-Si:H
3. Plasma and surface reactions during a-Si:H film growth
4. Plasma deposition of hydrogenated amorphous silicon: Studies of the growth surface
5. The defect density in amorphous silicon
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