Interpretation of macropore shape transformation in crystalline silicon upon high temperature processing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3462448
Reference35 articles.
1. Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing
2. Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique
3. Silicon nanostructuring for 3D bulk silicon versatile devices
4. Void shape evolution and formation of silicon-on-nothing structures during hydrogen annealing of hole arrays on Si(001)
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