Void shape evolution and formation of silicon-on-nothing structures during hydrogen annealing of hole arrays on Si(001)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3116545
Reference30 articles.
1. Silicon-on-Nothing (SON)-an innovative process for advanced CMOS
2. Study of pore reorganisation during annealing of macroporous silicon structures for solar cell application
3. Empty-space-in-silicon technique for fabricating a silicon-on-nothing structure
4. Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing
5. Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique
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