Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367052
Reference17 articles.
1. Ion-beam-deposited films produced by filtered arcevaporation
2. Influence of reactive gas on ion energy distributions in filtered cathodic vacuum arcs
3. Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc
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