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Short pulse-enhanced vacuum arc evaporation

Published:2022-11 Issue: Volume:205 Page:111459
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Oskirko V.O.,Goncharenko I.M.,Arestov S.I.,Semenov V.A.,Azhgikhin M.I.,Pavlov A.P.,Solovyev A.A.^ORCID

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference38 articles.

1. Optical emission spectroscopy in cathodic arc deposition;Kuhn;IEEE Trans. Plasma Sci.,1997

2. Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs;Bilek;J. Appl. Phys.,1998

3. Possibilities of influencing vacuum arc evaporation by time-dependent arc current;Ellrodt;Surf. Coat. Technol.,1995

4. Imaging and motion of cathode group spots during pulse-enhanced vacuum arc evaporation;Ma;Vacuum,2017

5. Discharge and plasma characteristics of pulse-enhanced vacuum arc evaporation (PEVAE) for titanium cathode;Ma;IEEE Trans. Plasma Sci.,2018

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of cathodic current of Cr ion etching on the structure and properties of TiAlN coated cemented carbide;International Journal of Refractory Metals and Hard Materials;2024-04

2. Tribocorrosion and Surface Protection Technology of Titanium Alloys: A Review;Materials;2023-12-22

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