Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362654
Reference15 articles.
1. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
2. Amorphous Si thin films prepared by vacuum arc deposition
3. Evaporation of Silicon by Vacuum-Arc Discharge
4. Electric probes in plasmas
5. Erosion and ionization in the cathode spot regions of vacuum arcs
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2. Low-temperature fabrication of nanocrystalline silicon thin films on mechanically flexible substrates by vacuum arc discharge;Journal of Materials Research;2011-04-19
3. Ion energy distribution of an inductively coupled radiofrequency discharge in argon and oxygen;Vacuum;2008-11
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