Control of vinylsilane plasma by changing the pressure: Correspondence with a quantum chemical prediction
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350755
Reference20 articles.
1. Excited states and photochemistry of saturated molecules. VII. Potential energy surfaces in excited singlet states of methane
2. Excited states and photochemistry of saturated molecules. The 1B1(1T2) surface in silane11Supported in part by National Science Foundation grant CHE7818070.
3. Anomalous decomposition profile of the excited triplet SiH3F: A prediction by ab initio molecular orbital calculations
4. On the primary process in plasma-chemical and photochemical vapor deposition from silane: An ab initio study of unimolecular decomposition of SiH4 in the lowest triplet state
5. Measurement of the SiH3Radical Density in Silane Plasma using Infrared Diode Laser Absorption Spectroscopy
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