Structures of the main precursors and initial decomposition products of diborane chemical vapor deposition: an experimental and ab initio molecular orbital study-Reference-Cited by-同舟云学术

Structures of the main precursors and initial decomposition products of diborane chemical vapor deposition: an experimental and ab initio molecular orbital study

Published:2000-07 Issue:4 Volume:325 Page:453-456
ISSN:0009-2614
Container-title:Chemical Physics Letters
language:en
Short-container-title:Chemical Physics Letters

Author:

Sato Kota,Kanda Noriyoshi,Ogata Takashige,Kumashiro Yukinobu

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Reference13 articles.

1. Ab initio MO study of neutral and cationic boron clusters

2. Structure and stability of small boron clusters. A density functional theoretical study

3. Control of vinylsilane plasma by changing the pressure: Correspondence with a quantum chemical prediction

4. Initial elementary processes in tetrafluoroethylene plasma: Anabinitiomolecular orbital study

5. Anomalous decomposition profile of the excited triplet SiH3F: A prediction by ab initio molecular orbital calculations

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