Chemical analysis of H2–B2H6and H2–CH4–B2H6microwave CVD plasmas used for diamond deposition
Author:
Funder
Deutsche Forschungsgemeinschaft
ANR
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/25/i=2/a=025016/pdf
Reference78 articles.
1. Diamond: Electronic Properties and Applications
2. Doping of diamond
3. Superconductivity in diamond
4. Superconductivity in Boron-Doped Diamond
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2. Diamond;Single Crystals of Electronic Materials;2019
3. Enhancement in conductivity of boron doped diamond films deposited by the methanol/acetone/B2O3 system;Vacuum;2018-11
4. Comparison of three optical diagnostic techniques for the measurement of boron atom density in a H2/B2H6 microwave plasma;Plasma Sources Science and Technology;2017-11-01
5. Optical Emission from C2– Anions in Microwave-Activated CH4/H2 Plasmas for Chemical Vapor Deposition of Diamond;The Journal of Physical Chemistry A;2017-04-03
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