Observation of incident angle dependent phonon absorption in hydrogenated amorphous silicon nitride thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.122919
Reference16 articles.
1. Influences of a high excitation frequency (70 MHz) in the glow discharge technique on the process plasma and the properties of hydrogenated amorphous silicon
2. Physical‐Electrical Properties of Silicon Nitride Deposited by PECVD on III–V Semiconductors
3. Analysis of SiH and SiN vibrational absorption in amorphousSiNx:H films in terms of a charge-transfer model
4. Determination of the hydrogen concentration of silicon nitride layers by Fourier transform infrared spectroscopy
5. Infrared Absorption at Longitudinal Optic Frequency in Cubic Crystal Films
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Orientation dependent LO and TO phonons absorption in silicon nitride thin films using infrared spectroscopy;ADVANCES IN BASIC SCIENCE (ICABS 2019);2019
2. A Hydrogen Plasma Treatment for Soft and Selective Silicon Nitride Etching;physica status solidi (a);2018-03-01
3. Down-shifting Si-based layer for Si solar applications;Solar Energy Materials and Solar Cells;2017-09
4. Understanding of a new approach for silicon nitride spacer etching using gaseous hydrofluoric acid after hydrogen ion implantation;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-03
5. Structural and emission properties of Tb3+-doped nitrogen-rich silicon oxynitride films;Nanotechnology;2017-02-17
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3