High quality molecular beam epitaxial growth on patterned GaAs substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96012
Reference7 articles.
1. GaAs planar technology by molecular beam epitaxy (MBE)
2. Monolithic integration of an AlGaAs/GaAs multiquantum well laser and GaAs metal‐semiconductor field‐effect transistors on a semi‐insulating GaAs substrate by molecular beam epitaxy
3. Growth of three‐dimensional dielectric waveguides for integrated optics by molecular‐beam‐epitaxy method
4. Self‐aligned three‐dimensional Ga1−xAlxAs structures grown by molecular beam epitaxy
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