Co-doping: An effective strategy for developing stable and high-speed Sb2Te-based phase-change memory

Author:

Hu Jing12ORCID,Lin Cong1,Cheng Yan3ORCID,Zheng Yonghui3ORCID,Wei Tao14ORCID,Li Wanfei1ORCID,Ling Yun1,Liu Qianqian1ORCID,Cheng Miao1,Wang Ruirui1,Song Sannian4,Song Zhitang4,Wei Yinghui5,Liu Bo14ORCID

Affiliation:

1. Suzhou Key Laboratory for Nanophotonic and Nanoelectronic Materials and Its Devices, School of Materials Science and Engineering, Suzhou University of Science and Technology 1 , Suzhou 215009, Jiangsu Province, People's Republic of China

2. State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 2 , Shanghai 200050, People's Republic of China

3. Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University 3 , Shanghai, People's Republic of China

4. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 4 , Shanghai 200050, People's Republic of China

5. Jiangsu Institute of Advanced Semiconductors Ltd. 5 , Suzhou 215123, Jiangsu Province, People's Republic of China

Abstract

Balancing operation speed and thermal stability is a big challenge in phase change memory (PCM). In this work, a carbon (C) and chromium (Cr) co-doped Sb2Te strategy has been proposed for achieving high operation speed and high stability in PCM applications. In general, doping with the appropriate Cr element is beneficial to improve thermal stability, but it will sacrifice its operation speed. C-doping can enhance thermal stability and retain its fast phase transition properties due to the carbon elements tend to form agglomerates in the host that ameliorate disorder of the amorphous phase without loss of the phase transition rate. Intriguingly, the as-prepared C1.19Cr0.23Sb2Te material exhibits good data retention (T10-year @ 155.0 °C) and low-volume change rate (1.8%), as well as fast switching speed (4 ns) and good endurance (>1 × 105 cycles). This research indicates that C and Cr co-doping is an effective method to achieve excellent stability of phase-change materials without sacrificing the phase-transition rate of Sb2Te materials.

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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