1. College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou, Zhejiang 310018, China
2. State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
3. International Laboratory of Quantum Functional Materials of Henan, School of Physics and Engineering, Zhengzhou University, Zhengzhou 450001, China
4. ULVAC Research Center Suzhou Company, Ltd, Suzhou 215026, China
5. Research Institute of Advanced Technologies, Laboratory of Infrared Materials and Devices, Ningbo University, Ningbo 315211, Zhejiang, China