A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
Author:
Affiliation:
1. School of Physics, Dalian University of Technology, Dalian 116024, China
2. Department of Electrical Engineering and Computer Science-1770, University of California, Berkeley, California 94720, USA
Funder
U.S. Department of Energy (DOE)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4993798
Reference55 articles.
1. Shaped electrode and lens for a uniform radio-frequency capacitive plasma
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