Analysis of marker motion in thin‐film silicide formation

Author:

Tu K. N.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 39 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Core-Shell Effect on Nucleation and Growth of Epitaxial Silicide in Nanowire of Silicon;One-Dimensional Nanostructures;2013-01-25

2. Nucleation and growth of epitaxial silicide in silicon nanowires;Materials Science and Engineering: R: Reports;2010-11

3. In situ x-ray diffraction study of Ni–Yb interlayer and alloy systems on Si(100);Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2010-01

4. Three-dimensional atomic-scale mapping of Pd in Ni1−xPdxSi∕Si(100) thin films;Applied Physics Letters;2007-09-10

5. Silicides;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09

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