Counter‐oxidation of superficial Si in single‐crystalline Si on SiO2structure
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112485
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1. 0.1- mu m-gate, ultrathin-film CMOS devices using SIMOX substrate with 80-nm-thick buried oxide layer
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3. Diffusivity of oxygen in silicon at the donor formation temperature
4. Permeation of Gaseous Oxygen through Vitreous Silica
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