Diffusivity of oxygen in silicon at the donor formation temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93731
Reference12 articles.
1. Mechanism of the Formation of Donor States in Heat-Treated Silicon
2. EPR spectra of heat-treatment centers in oxygen-rich silicon
3. Correlation of oxygen concentration and activated oxygen donors in silicon crystals on a microscale
4. Oxygen diffusion and thermal donor formation in silicon
5. Diffusivity of oxygen in silicon during steam oxidation
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