Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119547
Reference12 articles.
1. Towards high-eficiency silicon solar cells by rapid thermal processing
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4. Comparative study of phosphosilicate glass on (100) silicon by furnace and rapid isothermal annealing
5. On Structural Impact of Lamp Annealing in Device Back‐End Processing
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