On Structural Impact of Lamp Annealing in Device Back‐End Processing-Reference-Cited by-同舟云学术

On Structural Impact of Lamp Annealing in Device Back‐End Processing

Published:1986-01-01 Issue:1 Volume:133 Page:156-163
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Bársony István¹²,Anzai Hitoshi¹²,Nishizawa Jun‐ichi¹²

Affiliation:

1. Research Development Corporation of Japan, Optical Functional Device Group, Nishizawa Perfect Crystal Project, Hamamatsu Photonics K.K., 1126‐1 Ichinocho, Hamamatsu 435, Japan

2. Research Development Corporation of Japan, Nishizawa Perfect Crystal Project, Semiconductor Research Institute, Kawauchi, Sendai 980, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2108513/pdf

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