1. Short Time Annealing
2. Rapid isothermal processing
3. , and , ‘Rapid thermal annealing of P+ and PF5+ implanted silicon and its application to solar cells’, Proceedings of the 18th IEEE Photovoltaic Specialists Conference, p. 1756, IEEE, New York, 1985.
4. , and , ‘Applications of fast thermal processing of implanted multicrystalline silicon in solar cell technology’, Proceedings of the 18th IEEE Photovoltaic Specialists Conference, p. 1100, IEEE, New York, 1985.