Nonlinear capacitance variations in amorphous oxide metal-insulator-metal structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2800291
Reference22 articles.
1. Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors
2. Modeling of nonlinearities in the capacitance-voltage characteristics of high-k metal-insulator-metal capacitors
3. The International Technology Roadmap for Semiconductors (ITRS) (Semiconductor Industry Association, 2006), p. 6 (http:/public.itrs.net).
4. Atomic layer deposition of ZrO2 on W for metal–insulator–metal capacitor application
5. Physical and electrical characterization of HfO2 metal–insulator–metal capacitors for Si analog circuit applications
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