Deposition parameters and film properties of hydrogenated amorphous silicon prepared by high rate dc planar magnetron reactive sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333024
Reference26 articles.
1. Recent developments in amorphous silicon solar cells
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5. Transport properties of a-Si: H alloys prepared by r.f. sputtering I
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