Low Pressure Sputtering System of the Magnetron Type
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1684039
Reference6 articles.
1. Efficient Low Pressure Sputtering in a Large Inverted Magnetron Suitable for Film Synthesis
2. Sputtering in a Crossed Electromagnetic Field
3. Reactively sputtered titanium resistors, capacitors and rectifiers for microcircuits
4. Discharges between Coaxial Cylinders in a Magnetic Field
5. Instability of Rotating Electron Sheath in Crossed Field Device
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