Efficient Low Pressure Sputtering in a Large Inverted Magnetron Suitable for Film Synthesis
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Published:1965-03
Issue:3
Volume:36
Page:277-282
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Author:
Gill W. D.,Kay Eric
Cited by
68 articles.
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