Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Electronic, Optical and Magnetic Materials
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Physics and technology of magnetron sputtering discharges;Plasma Sources Science and Technology;2020-11-01
2. Thin films for material engineering;Japanese Journal of Applied Physics;2016-06-09
3. Thin Films as Material Engineering;Journal of Superconductivity and Novel Magnetism;2015-01-22
4. Sputtering Systems;Handbook of Sputtering Technology;2012
5. Sputtering Systems;Thin Film Materials Technology;2004