Influence of surface coatings on elasticity, residual stresses, and fracture properties of silicon microelements
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342585
Reference9 articles.
1. Young’s modulus measurements of thin films using micromechanics
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4. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon
5. Microfabricated structures for theinsitumeasurement of residual stress, Young’s modulus, and ultimate strain of thin films
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