Microfabricated structures for theinsitumeasurement of residual stress, Young’s modulus, and ultimate strain of thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98460
Reference8 articles.
1. Properties of Thin Polyimide Films
2. A technique for the determination of stress in thin films
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5. A simple technique for determining the stress at the Si/SiO2interface
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