Germanium n-type shallow junction activation dependences
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2037861
Reference12 articles.
1. Germanium MOS capacitors incorporating ultrathin high-/spl kappa/ gate dielectric
2. Activation and diffusion studies of ion-implanted p and n dopants in germanium
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