Author:
Miyagawa S.,Ato Y.,Moriya Y.
Subject
General Physics and Astronomy
Cited by
5 articles.
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2. Ion beam induced atomic mixing in Ti/SiC;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-08
3. Energy dependence of the ion-induced sputtering yields of monatomic solids;Atomic Data and Nuclear Data Tables;1984-07
4. Sputtering yield measurements;Topics in Applied Physics;1981
5. Sputtering Yields;Topics in Applied Physics