Contributions of backscattered ions to sputtering yields depending on primary ion energy
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Published:1973-01
Issue:2
Volume:19
Page:69-75
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ISSN:0033-7579
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Container-title:Radiation Effects
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language:en
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Short-container-title:Radiation Effects
Author:
Weissmann R.,Behrisch R.
Publisher
Informa UK Limited
Subject
General Engineering
Cited by
58 articles.
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