Author:
Matsunami Noriaki,Yamamura Yasunori,Itikawa Yukikazu,Itoh Noriaki,Kazumata Yukio,Miyagawa Soji,Morita Kenji,Shimizu Ryuichi,Tawara Hiroyuki
Subject
Nuclear and High Energy Physics,Atomic and Molecular Physics, and Optics
Reference15 articles.
1. Sputtering by Particle Bombardment;Andersen,1981
2. Sputtering by Particle Bombardment;Roosendaal,1981
3. Alloy sputtering
4. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
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