Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions-Reference-Cited by-同舟云学术

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Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions

Published:2024-09 Issue: Volume:554 Page:165433
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Kovtun Yu.V.^ORCID,Kuprin A.S.^ORCID,Podhurska V.Ya.^ORCID

Publisher

Elsevier BV

Reference85 articles.

1. Sputtering by Particle Bombardment i. Physical Sputtering of Single-Element Solids,1981

2. Sputtering by Particle Bombardment II. Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography,1983

3. Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies,2007

4. Reactive Sputter Deposition,2008

5. D.M. Mattox, Handbook of Physical Vapor Deposition (PVD) Processing, Second Edition, Second, Elsevier, 2010. https://doi.org/10.1016/C2009-0-18800-1.

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