Thin-film metrology of silicon-on-insulator materials
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125651
Reference8 articles.
1. Thin film silicon on insulator substrates and their application to integrated circuits
2. Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
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4. A study of Si implanted with oxygen using spectroscopic ellipsometry
5. Spectroellipsometric characterization of SIMOX with a very thin Si layer
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