Thin film silicon on insulator substrates and their application to integrated circuits-Reference-Cited by-同舟云学术

Thin film silicon on insulator substrates and their application to integrated circuits

Published:1996-01 Issue:1 Volume:25 Page:13-21
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Wilson S. R.,Wetteroth T.,Hong S.,Shin H.,Hwang B. Y.,Foerstner J.,Racanelli M.,Huang M.,Shin H. C.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02666168.pdf

Reference20 articles.

1. G.W. Cullen, M.T. Duffy and A.C. Ipri,Silicon-on Insulator Technology and Devices, eds. Sorin Cristoloveanu, Katsu Izumi, Peter L.F. Hemment and Harold Hosack (Pennington, NJ: The Electrochemical Society, Inc., 1994), p. 5.

2. J.P. Colinge,Silicon-on-Insulator Technology, (Kluwer Academic Publishers, 1991).

3. Lisa P. Allen,J. Electron Mater. 25, 93 (1996).

4. P.B. Mumola, G.J. Gardopee, P.J. Clapis, C.B. Zarowin, L.D. Bollinger and A.M. Ledger,Proc. 1992 IEEE Intl. SOI Conf., (Piscataway, N J: Institute of Electrical and Electronics Engineers, Inc, 1992), p. 152.

5. Subramanian S. Iyer, Thomas O. Sedgwick, Phillip M. Pitner and Manu J. Tejwani,Semiconductor Silicon/1994. eds. H.R. Huff, W. Bergholz and K. Sumino (Pennington, NJ: The Electrochemical Society, Inc., 1994), p. 391.

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