Silicon‐on‐insulator structures formed by a line‐source electron beam: Experiment and theory

Author:

Knapp J. A.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 39 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Emission characteristics of the thermionic electron beam sources developed at EBSDL;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2008-01

2. Controlled line shaped electron beam for silicon zone melting recrystallization on float glass substrates;Review of Scientific Instruments;2005-06

3. Magnetically confined high power thermionic line source emitter assembly;Vacuum;2005-01

4. Laser and Electron Beam Assisted Processing;Handbook of Thin Film Deposition Processes and Techniques;2001

5. Methods of Forming SOI Wafers;Electrical Characterization of Silicon-on-Insulator Materials and Devices;1995

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