Silicide formation using a scanning cw laser beam
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91548
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1. Laser‐induced reactions of platinum and other metal films with silicon
2. Dynamics of laser‐induced formation of palladium silicide
3. Cellular structure and silicide formation in laser‐irradiated metal‐silicon systems
4. A laser‐scanning apparatus for annealing of ion‐implantation damage in semiconductors
5. The growth and transformation of Pd2Si on (111), (110) and (100) Si
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