Laser‐induced reactions of platinum and other metal films with silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90244
Reference7 articles.
1. Laser Pattern Generation Using X–Y Beam Deflection
2. Properties of Si diodes prepared by alloying Al into n-type Si with heat pulses from a Nd:YAG laser
3. Silicon diodes made by laser irradiation
4. Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
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