Cellular structure and silicide formation in laser‐irradiated metal‐silicon systems
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91105
Reference10 articles.
1. Some features of laser annealing of implanted silicon layers
2. Spatially controlled crystal regrowth of ion‐implanted silicon by laser irradiation
3. Amorphous thickness dependence in the transition to single crystal induced by laser pulse
4. Laser annealing of boron‐implanted silicon
5. Silicon epitaxy by pulsed laser annealing of evaporated amorphous films
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