Study of the effect of grain boundary migration on hillock formation in Al thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1381045
Reference32 articles.
1. On the mechanism of hillocks formation in vapour deposited thin films
2. Topography and microstructure of Al films formed under various deposition conditions
3. Hillock‐free integrated‐circuit metallizations by Al/Al‐O layering
4. The effect of surface aluminum oxide films on thermally induced hillock formation
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