Large-area total-thickness imaging and Burgers vector analysis of dislocations in β-Ga2O3 using bright-field x-ray topography based on anomalous transmission

Author:

Yao Yongzhao1ORCID,Tsusaka Yoshiyuki2ORCID,Sasaki Kohei3ORCID,Kuramata Akito3ORCID,Sugawara Yoshihiro1ORCID,Ishikawa Yukari1ORCID

Affiliation:

1. Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan

2. Graduate School of Material Science, University of Hyogo, 3-2-1, Koto, Kamigori-cho, Ako-gun, Hyogo 678-1297, Japan

3. Novel Crystal Technology, Inc., Sayama 350-1328, Japan

Abstract

Using bright-field x-ray topography based on anomalous transmission (AT), we have demonstrated the first large-area total-thickness imaging of dislocations in β-Ga2O3 at the substrate scale. The dislocation images were acquired from the entire 10 mm × 15 mm × 680  μm (001)-oriented substrate prepared by edge-defined film-fed growth (EFG) by stitching together hundreds of topographic images, each recorded with the forward-diffracted beam in the Laue geometry for g =  020, 0–20, 022, and 400, under the conditions in which AT occurred. Dislocations distributed over the entire crystal volume were imaged as long as their Burgers vectors ( b) were not orthogonal to the g-vectors. The results of the g· b analysis of the dislocation contrasts clearly revealed three major dislocation types that were numerically dominant in the EFG crystal: (i) b-axis screw-type dislocations with b∥ ξ∥[010] ( ξ is the unit vector of line direction), (ii) b-axis edge-type dislocations with b∥[001] and ξ∥[010], and (iii) curved mixed-type dislocations lying on the (001) planes with b∥[010]. Based on their b - and ξ-vectors, types (i) and (ii) were attributed to dislocations that propagated during EFG pulling up along the [010] direction, while type (iii) was attributed to dislocations generated through glide in the [010](001) slip system under stress. The extent to which AT can manifest itself is explained by using the effective absorption coefficient calculated for the above g-vectors based on dynamical x-ray diffraction theory.

Funder

Japan Society for the Promotion of Science

METI Monozukuri R&D Support Grant Program for SMEs, Japan

Murata Science Foundation

Nippon Sheet Glass Foundation for Materials Science and Engineering

Kazuchika Okura Memorial Foundation

Innovative Science and Technology Initiative for Security, ATLA, Japan

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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