Formation of chemical bonds and morphological studies of a-CNx : Effects of PECVD deposition pressure
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2. Komposisi Ikatan Kimia dan Mekanisme Pertumbuhan Filem Nipis a-CNx oleh Teknik rf-PECVD Suhu Rendah;Sains Malaysiana;2020-06-30
3. Structural and optical characterization of carbon nitride layers deposited by plasma assisted chemical vapor deposition at various conditions;Thin Solid Films;2018-01
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