Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering-Reference-Cited by-同舟云学术

Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering

Published:2015-09 Issue:5 Volume:33 Page:05E112
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Bakoglidis Konstantinos D.¹,Schmidt Susann¹,Garbrecht Magnus¹,Ivanov Ivan G.¹,Jensen Jens¹,Greczynski Grzegorz¹,Hultman Lars¹

Affiliation:

1. Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden

Funder

VINNOVA

Stiftelsen för Strategisk Forskning (Swedish Foundation for Strategic Research)

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4923275

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