Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas
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http://aip.scitation.org/doi/pdf/10.1063/1.4982182
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1. Influence of Different CH4/N2 Ratios on Structural and Mechanical Properties of a-CNx:H Film Synthesized Using Plasma Focus
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3. Effect of deposition temperature on chemical composition and electronic properties of amorphous carbon nitride (a-CNx) thin films grown by plasma assisted pulsed laser deposition
4. THE OPTICAL PROPERTIES OF NITROGENATED AMORPHOUS CARBON FILMS GROWN BY A NOVEL SURFACE WAVE MICROWAVE PLASMA CVD METHOD
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