Komposisi Ikatan Kimia dan Mekanisme Pertumbuhan Filem Nipis a-CNx oleh Teknik rf-PECVD Suhu Rendah
-
Published:2020-06-30
Issue:6
Volume:49
Page:1461-1470
-
ISSN:0126-6039
-
Container-title:Sains Malaysiana
-
language:
-
Short-container-title:JSM
Author:
Abd Aziz Siti Aisyah,Awang Rozidawati
Publisher
Penerbit Universiti Kebangsaan Malaysia (UKM Press)
Subject
Multidisciplinary