Enhanced Sb diffusion in Si under thermal Si3N4films during annealing in Ar
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100439
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1. Very Thin Silicon Nitride Films Grown by Direct Thermal Reaction with Nitrogen
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3. Thermal nitridation of Si and SiO2for VLSI
4. Effect of Si and SiO2thermal nitridation on impurity diffusion and oxidation induced stacking fault size in Si
5. Effect of thermal nitridation processes on boron and phosphorus diffusion in 〈100〉 silicon
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