Optimizing laser produced plasmas for efficient extreme ultraviolet and soft X-ray light sources
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4891970
Reference24 articles.
1. Laser-produced plasma-based extreme-ultraviolet light source technology for high-volume manufacturing extreme-ultraviolet lithography
2. Laser produced plasma sources for nanolithography—Recent integrated simulation and benchmarking
3. LPP-EUV light source development for high volume manufacturing lithography
4. Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production
5. Enhancing the performance of LPP sources for EUV and BEUV lithography
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Simulation of Extreme Ultraviolet Radiation and Conversion Efficiency of Lithium Plasma in a Wide Range of Plasma Situations;Atoms;2024-03-12
2. Thomson scattering measurements of electron temperature and electron density in laser-driven Gd plasmas;Journal of Physics D: Applied Physics;2023-07-12
3. Femtosecond long-wave-infrared generation in hydrogen-filled hollow-core fiber;Journal of the Optical Society of America B;2023-03-20
4. Measurements of x-ray spectra and absolute energies of laser produced Al plasmas;Sixth International Symposium on Laser Interaction with Matter;2022-12-22
5. Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources;Scientific Reports;2021-07-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3