Development of microcracks in hydrogen-implanted silicon substrates-Reference-Cited by-同舟云学术

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Development of microcracks in hydrogen-implanted silicon substrates

Published:2013-09-28 Issue:12 Volume:114 Page:123513
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Penot Jean-Daniel,Massy Damien,Rieutord François,Mazen Frederic,Reboh Shay,Madeira Florence,Capello Luciana,Landru Didier,Kononchuk Oleg

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4821239

Reference18 articles.

1. Silicon on insulator material technology

2. Silicon-on-insulator by the Smart Cut™ Process

3. Localized exfoliation versus delamination in H and He coimplanted (001) Si

4. H-induced subcritical crack propagation and interaction phenomena in (001) Si using He-cracks templates

5. Quantitative study of hydrogen-implantation-induced cavities in silicon by grazing incidence small angle x-ray scattering

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modulation of post-fracture roughness with induced shear stress in the smart cut process;Journal of Applied Physics;2024-07-22

2. Brittle fracture studied by ultra-high-speed synchrotron X-ray diffraction imaging;Journal of Applied Crystallography;2022-07-30

3. In Situ Observation of Pressurized Microcrack Growth in Silicon;physica status solidi (a);2021-08

4. Experimental study of post-crack vibrations in dynamic fracture;Journal of Applied Physics;2021-05-14

5. Fracture Wake Patterns in Brittle Solids;Physical Review Applied;2021-02-26

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