In Situ Observation of Pressurized Microcrack Growth in Silicon-Reference-Cited by-同舟云学术

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In Situ Observation of Pressurized Microcrack Growth in Silicon

Published:2021-08 Issue:23 Volume:218 Page:2100219
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Colonel Lucas¹^ORCID,Mazen Frédéric¹,Landru Didier²,Kononchuk Oleg²,Ben Mohamed Nadia²,Rieutord François³

Affiliation:

1. Univ. Grenoble Alpes CEA‐LETI MINATEC Campus 17 avenue des Martyrs Grenoble 38054 Cedex 9 France

2. SOITEC Parc Technologique des Fontaines Bernin 38190 France

3. Univ. Grenoble Alpes CEA‐IRIG 17 avenue des Martyrs Grenoble 38054 Cedex 9 France

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202100219

Reference24 articles.

1. Silicon on insulator material technology

2. Impact of the transient formation of molecular hydrogen on the microcrack nucleation and evolution in H-implanted Si (001)

3. Development of microcracks in hydrogen-implanted silicon substrates

4. Deformation-induced silicon nanostructures

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modulation of post-fracture roughness with induced shear stress in the smart cut process;Journal of Applied Physics;2024-07-22

2. Three-dimensional X-FEM modeling of crack coalescence phenomena in the Smart CutTM technology;Finite Elements in Analysis and Design;2023-01

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