Condensed chlorine etching of GaAs induced by excimer laser radiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107758
Reference10 articles.
1. Determination of nonradiative surface layer thickness in quantum dots etched from single quantum well GaAs/AlGaAs
2. Reactive ion etching of GaAs in CCl4/H2and CCl4/O2
3. Low‐temperature reactive ion etching and microwave plasma etching of silicon
4. Laser-Induced Chemical Etching of Solids: Promises and Challenges
5. Single-Crystal Silicon Etching Characteristics Using Excimer Laser Cℓ2 GAS
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2. Fabrication and characterization of InGaAlP∕InGaP semiconductor circular ring lasers;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2005
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5. Low-Temperature Chlorination of GaAs(100);The Journal of Physical Chemistry B;1998-01-23
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